ZTS-9020 / ZTS-9050 / ZTS-9090

A high-speed, precision surface profiling inspection sensor for shop-floor installation.

Non-contact 3D Surface Profiling Sensor

Optimized for very high resolution surface profiling of cylindrical structures, the ZeroTouch® ZTS-9000 Series system can scan cylinders up to 200mm in depth.

Fast, Precise 3D Surface Measurements

The ZeroTouch® 9000 Series sensor evaluates several thousand surface profiles using advanced white-light interferometry technology to capture high-speed, precision data acquisition and real-time 3D surface roughness measurements. Using high-resolution cameras, the sensor provides highly significant results without the limits of tactile measuring systems.

Determination of honing angle and volume parameters.
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Surface Measurements

High-resolution cameras measure both smooth and rough specimen surfaces without contact, characterizing mechanically processed surfaces such as mirrors, semiconductor wafers, micro-lenses, glass, metal, plastic, composite, or other surfaces.

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Precision Height Mapping

The sensor works with interference objectives from 5x to 100x, yielding fast, precise representation of the height information and the relevant surface parameters using a piezo objective adjuster and broadband wavelength spectrum lighting.

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ISO Conform Roughness Measurements

Objectives starting from 10x and higher can be used for ISO confirm roughness measurements in accordance with ISO 25178 and ISO 4287.

Aerospace

  • Bearings
  • Cylinders, pipes, and bores
  • Gears and sprockets
  • Shafts and seals
  • Inline measurements
  • Actuators

Automotive

  • Bearings
  • Brakes and clutches
  • Sensors
  • Engines
  • Gears and sprockets
  • Shafts and seals
Semiconductor Industry

Semiconductors

  • Wafer inspection and metrology
  • Electro polished surfaces
  • Die attach
  • ​Inkjet nozzle plate
  • High purity valves
Medical Devices Industry

Medical Devices

  • Dental implants
  • Medical blades and sharps
  • Stents
  • Orthopedics

Precision Manufacturing

  • Precision machined parts
  • Power cutting tools
  • Lenses

Features & Benefits

  • Non-contact measurements of smooth, rough, and specular surfaces such as glass, metal, plastic, and composites
  • Precise measurement of height and relevant surface parameters
  • Installed in the immediate vicinity of the production line
  • Inspects mirrors, semiconductor wafers, microlenses, and solar cells
  • Micron-level, fast measurements of various surface profiles
  • 3D sensor with manually interchangeable objective
  • White-light interferometry-based, very high-resolution sensor
  • Piezo positioning system with interferometric calibrated closed-loop controller (up to 200µm scan range)
  • Variable configurations for multiple inspection tasks
  • Advanced algorithms improve speed and reduce system noise

Specifications

High-Resolution Camera

Measuring Points 2,000 x 2,000
Scanning Speed, Full Resolution 88 Hz
Scanning Speed ROI Up to 2 kHz
Topography Reproducibility <1 nm
Objective / Magnification Working Distance / mm Measuring Field / mm² Point Spacing / µm
5x 9.3 2.8 x 2.8 1.4
10x 7.4 1.4 x 1.4 0.7
20x 4.7 0.7 x 0.7 0.35
50x 3.4 0.28 x 0.28 0.14
100x 2 0.14 x 0.14 0.07

System Performance

1-σ Reproducibility 12 μm Step Height <5 nm

Scanning

Scan Range Up to 200 μm
Scanning Speed, Full Resolution 5.9 μm/s
Maximum Scanning Speed ~148 μm/s
Digitization Up to 0.01 pm

Machine Size

Sensor Weight ~16 kg (35.2 lbs)
Cylinder Diameter 70-125 mm (standard configuration)
Standard Insertion Axis ~188 mm
Extended Insertion Axis ~270 mm
Motorized Insertion Axis ~200 mm / stitching

Resources

Benefits of Consolidating Metrology Operations

Automated metrology platforms not only ensure high quality finished goods, these high speed solutions also lower total cost per part by consolidating multiple metrology operations into one system.

Improving Long-Term Performance of Metrology Systems

In challenging manufacturing environments, adjustability, calibration, and monitoring are key influences on the long-term performance of automated metrology systems installed in uncontrolled environments.

Speed Wins in Contact vs. Non-Contact Surface Profiling

In surface morphology inspection, non-contact optical methodologies provide the same measurement results as a conventional contact profiler—but in a fraction of time.

Contact Us

With manufacturing facilities located in the U.S. and China, DWFritz provides exceptional global support services.