ZTS-3020 / ZTS-3050
A high-speed, precision surface profiling inspection sensor for shop-floor installation.
Non-contact 3D Surface Profiling Sensor
The ZeroTouch® 3000 Series non-contact surface profiling sensor generates a 3D point cloud of micro-geometries and micro-structures down to single atom layers.
Fast, Precise 3D Surface Measurements
The ZeroTouch® 3000 Series sensor evaluates several thousand surface profiles using advanced white-light interferometry technology to capture high-speed, precision data acquisition and real-time 3D surface roughness measurements. Using high-resolution cameras, the sensor provides highly significant results without the limits of tactile measuring systems.
High-resolution cameras measure both smooth and rough specimen surfaces without contact, characterizing mechanically processed surfaces such as mirrors, semiconductor wafers, micro-lenses, glass, metal, plastic, composite, or other surfaces.
Precision Height Mapping
The sensor works with interference objectives from 2.5x to 50x, yielding fast, precise representation of the height information and the relevant surface parameters using a piezo objective adjuster and broadband wavelength spectrum lighting.
ISO Conform Roughness Measurements
Objectives starting from 10x and higher can be used for ISO confirm roughness measurements in accordance with ISO 25178 and ISO 4287.
Features & Benefits
- Non-contact measurements of smooth, rough, and specular surfaces such as glass, metal, plastic, and composites
- Precise measurement of height and relevant surface parameters
- Installed in the immediate vicinity of the production line
- Inspects mirrors, semiconductor wafers, microlenses, and solar cells
- Micron-level, fast measurements of various surface profiles
- 3D sensor with manually interchangeable objective
- White-light interferometry-based, very high-resolution sensors (5 MP and 2.3 MP)
- Piezo positioning system with interferometric calibrated closed-loop controller (up to 400µm scan range)
- Optional XY positioning table with manual Z adjustment
- Advanced algorithms improve speed and reduce system noise
|5 MP (ZTS-3050)||2.3 MP (ZTS-3020)|
|Measuring Points||2,456 x 2,054||1,920 x 1,200|
|Scanning Speed, Full Resolution||77 Hz||169 Hz|
|Scanning Speed ROI||Up to 2 kHz||Up to 3.2 kHz|
|Topography Reproducibility||<0.1 nm||<0.15 nm|
|Scanning Speed||5.2 μm/s||11.4 μm/s|
|Objective / Magnification||Working Distance / mm||Measuring Field / mm²||Point Spacing / µm||Working Distance / mm||Measuring Field / mm²||Point Spacing / µm|
|2.5x||10.3||6.8 x 5.7||2.8||10.3||7.3 x 4.6||3.8|
|5x||9.3||3.4 x 2.8||1.4||9.3||3.7 x 2.3||1.9|
|10x||7.4||1.7 x 1.4||0.69||7.4||1.8 x 1.2||0.96|
|20x||4.7||0.85 x 0.71||0.35||4.7||0.91 x 0.58||0.48|
|50x||3.4||0.34 x 0.28||0.14||3.4||0.37 x 0.23||0.19|
|100x||2||0.17 x 0.14||0.07||2||0.18 x 0.12||0.1|
|115x||0.7||0.15 x 0.12||0.6||0.7||0.16 x 0.1||0.08|
|1-σ Reproducibility 0.4 μm Step Height||<1 nm|
|1-σ Reproducibility 12 μm Step Height||<3 nm|
|1-σ Reproducibility 100 μm Step Height||<20 nm|
|Sensor Weight||~2 kg (4.4 lbs)|
|Coarse Positioning Range (max.)
(manual Z positioning)
|Fine Positioning Range
(manual Z positioning)
|Tilted Angle (leveling device)||±3°|
|Scan Range||Up to 400 μm|
|Maximum Scanning Speed||~400 μm/s|
|Digitization||Up to 0.01 pm|
|Positioning Area||100 x 100 mm²|
|Load Capacity||2 kg|
|Vibration Isolation||Options available|
¹ Other positioning table sizes available on request.
Benefits of Consolidating Metrology Operations
Automated metrology platforms not only ensure high quality finished goods, these high speed solutions also lower total cost per part by consolidating multiple metrology operations into one system.
Improving Long-Term Performance of Metrology Systems
In challenging manufacturing environments, adjustability, calibration, and monitoring are key influences on the long-term performance of automated metrology systems installed in uncontrolled environments.
Speed Wins in Contact vs. Non-Contact Surface Profiling
In surface morphology inspection, non-contact optical methodologies provide the same measurement results as a conventional contact profiler—but in a fraction of time.
With manufacturing facilities located in the U.S. and China, DWFritz provides exceptional global support services.