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The SECS/GEM interface is the semiconductor and MEMS industry’s standard for equipment-to-host communications. In an automated fab, the interface can start and stop equipment processing, collect measurement data, change variables and select recipes for products. The SECS (SEMI Equipment Communications Standard)/GEM (Generic Equipment Model) standards do all this in a defined way. DWFritz offers this functionality in our systems to our clients who need it.
DWFritz solves challenges posed by bowed wafers and achieves < 1 micron accuracy in 3-D, from one side to the other.
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Apply laminate quickly with no bubbles, full process control via user recipes, and no changeover for different thicknesses.
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Contact DWFritz Automation through this website or telephone us at (503) 598-9393 to get a free evaluation of your project. We’ll review your automation needs and provide an analysis of your requirements. Get in touch.