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Machine receives processed wafers via conveyor and uses machine vision to read wafer ID’s. Using custom software to determine location, a Brooks-PRI® robot sorts the wafers into one of 10 cassettes.
| Component | Specifications |
|---|---|
| SORTING ROBOT: |
Brooks-PRI®. |
| CONTROL SYSTEM: |
Custom designed, Windows 2000®-based control system with real-time kernel. |
| OPERATOR INTERFACE: |
Custom GUI (graphical user interface) in C . |
| MACHINE VISION: |
PC based Cognex® OCR. |
| WAFER SORTING: |
Utilizes an optical character reader and flat finder to sort wafers into 10 different cassettes. |
| SERVO CONTROL: |
Brooks-PRI® Controller and Animatics® Smart Motor. |
| ENVIRONMENT: |
Class 10,000 clean room. |
| ETHERNET DISTRIBUTED I/O: |
96 points. |
| THROUGHPUT: |
Process specific. |
| STORAGE CAPACITY: |
Ten wafer cassettes (6-inch wafers). Easily upgradeable to 8-inch wafers. |
| KEY ATTRIBUTES: |
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| INTEGRATED TECHNICAL CAPABILITIES: |

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