Wafer Sorting Platform

Machine receives processed wafers via conveyor and uses machine vision to read wafer ID’s. Using custom software to determine location, a Brooks-PRI® robot sorts the wafers into one of 10 cassettes.

Technical Specifications

Component	Specifications
SORTING ROBOT:	Brooks-PRI®.
CONTROL SYSTEM:	Custom designed, Windows 2000®-based control system with real-time kernel.
OPERATOR INTERFACE:	Custom GUI (graphical user interface) in C .
MACHINE VISION:	PC based Cognex® OCR.
WAFER SORTING:	Utilizes an optical character reader and flat finder to sort wafers into 10 different cassettes.
SERVO CONTROL:	Brooks-PRI® Controller and Animatics® Smart Motor.
ENVIRONMENT:	Class 10,000 clean room.
ETHERNET DISTRIBUTED I/O:	96 points.
THROUGHPUT:	Process specific.
STORAGE CAPACITY:	Ten wafer cassettes (6-inch wafers). Easily upgradeable to 8-inch wafers.
KEY ATTRIBUTES:	Uses servo-driven wafer flat finder. Sorts from 4-lane conveyor input, to/from any of 10 cassettes. 6-inch wafers shown, but can be customized to other sizes. Each cassette station can be configured to either sort from or receive wafers. When configured to sort from, each cassette is scanned prior to sorting. Uses sensors to verify wafer location and protect wafers. Light curtain perimeter guarding. Custom display shows ID of each wafer in sorted cassette. Custom functions or recipes can easily be programmed.
INTEGRATED TECHNICAL CAPABILITIES:	Wafer Handling Integrated Motion Control PC Controls Machine Vision – High Performance and Low Cost Clean Room Machines Custom Graphical User Interface (GUI)

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