Custom Wafer Laminator

Apply Laminate Quickly With No Bubbles, Full Process Control Via User Recipes, And No Changeover For Different Thicknesses.

The Custom Wafer Laminator combines temperature and pressure to apply a thin plastic laminate to the surface of a wafer. Operator-loaded cassettes are automatically rotated for handling by the ISEL robot, with wafer alignment confirmed by thru-beam sensors.

Wafers are oriented on an ISEL notch finder, then transferred to the heated wafer chuck at the press assembly. Laminate material is automatically positioned over the current wafer on the press, then applied per the time, temperature, and pressure specified in the operator-selected recipe. After the press procedure is completed, the trimmer assembly lowers to accurately trim the laminate to the edge of the wafer. The completed wafer is returned to its original cassette.

Two cassette loaders are installed, enabling continuous wafer processing until sensors alert the operator to a pending end-of-roll condition at the laminate supply. A splicing table is installed within the enclosure, enabling the operator to quickly attach and advance a new laminate roll.

During automated machine operation, operator attention is required only for cassette load/unload and responding to any alerts generated during the process.

Technical Specifications

Component	Specifications
Control System and User Interface:	Motion control via GALIL. Temperature controls by Watlow. Custom operator interface designed in C#.NET, with system running on Windows XP platform. Remote operation supported. Computer functions protected by on-board UPS backup power supply.
Material Handling:	Wafer handling via ISEL ROBOTIK 3-axis robot. Laminate roller is servo-controlled by Galil. Laminate tension and take-up by Magpower magnetic particle clutches using load cell feedback.
Environment:	Designed for class 100 cleanroom operation; full HEPA filtration provided within enclosure.
Throughput:	(process dependent)
Storage Capacity:	2 wafer cassettes at 25 wafers each
Safety:	All moving machinery contained within fully interlocked enclosure. No operator access while control power is active.
INTEGRATED TECHNICAL CAPABILITIES:	Integrated Motion Control Custom Graphical User Interface (GUI) SECS-GEM Compliance PC Controls Pick and Place Handling Robotics Web Handling Machines

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