The Precision Automation Experts | We'll own your problem
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The Precision Automation Experts | We'll own your problem
The Class 10 Wafer Autoloader tool accepts 150mm, 200mm, or 300mm wafers, and uses an ISEL three axis robot to load a client-provided wafer inspection tool. Wafers enter the system via an operator-loaded wafer cassette. The cassette is automatically detected, and then scanned for contents and cross-slotted wafers. After scanning is completed, the robot transfers a wafer to the prealigner. The wafer on the prealigner is aligned, scanned for scribe identification, and centered for processing. The robot then moves the wafer to the inspection platform. When processing is completed, the robot places the wafer in the output cassette.
| Component | Specifications |
|---|---|
| Control System: |
PC based |
| Operator Interface: |
Enhanced on-robot macros for safe wafer handling and integration with customer software. |
| Wafer Handling Robot: |
Isel GB4S robot with vacuum wand end effector. |
| Environment: |
Cleanroom, Class 10 or above. |
| Motion Control: |
ISEL Robot Control Center (“RCC”) |
| Wafer Tracking: |
Cognex OCR. |
| Safety: |
Fully guarded enclosure with safety interlocks at all entry points. |
| Inspection: |
(Proprietary: Client-provided) |
| Wafer Orientation: |
Isel aligner/notch finder. |
| Storage Capacity: |
Two 150mm, 200mm, or 300mm wafer cassettes, 25 wafers/cassette. |
| INTEGRATED TECHNICAL CAPABILITIES: |
Contact DWFritz Automation through this website or telephone us at (503) 598-9393 to get a free evaluation of your project. We’ll review your automation needs and provide an analysis of your requirements. Get in touch.