Automated Wafer Inspection

The Automated Wafer Inspection tool accepts 150mm, 200mm, or 300mm wafers, and uses an ISEL three axis robot to load a client-provided wafer inspection tool. Wafers enter the system via an operator-loaded wafer cassette. The cassette is automatically detected, and then scanned for contents and cross-slotted wafers. After scanning is completed, the robot transfers a wafer to the prealigner. The wafer on the prealigner is aligned, scanned for scribe identification, and centered for processing. The robot then moves the wafer to the inspection platform. When processing is completed, the robot places the wafer in the output cassette.

Technical Specifications

Component	Specifications
Control System:	PC based
Operator Interface:	Enhanced on-robot macros for safe wafer handling and integration with customer software.
Wafer Handling Robot:	Isel GB4S robot with vacuum wand end effector.
Environment:	Cleanroom, Class 10 or above.
Motion Control:	ISEL Robot Control Center (“RCC”)
Wafer Tracking:	Cognex OCR
Inspection:	(Proprietary: Client-provided)
Wafer Orientation:	Isel aligner/notch finder.
Storage Capacity:	Two 150mm, 200mm, or 300mm wafer cassettes, 25 wafers/cassette.
Safety:	Fully guarded enclosure with safety interlocks at all entry points.
INTEGRATED TECHNICAL CAPABILITIES:	Wafer Handling Integrated Motion Control Inspection and Quality Assurance Clean Room Machines Precision Positioning and Alignment PC Controls Robotics

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