ASML Autoloader

Near-Zero Maintenance Tool Solves Ergonomic Problems and Reduces Waste.

This machine automatically loads two different sized mask pods (six-reticle or single-reticle) onto the ASML PAS 5500 machine. It was designed to eliminate ergonomic issues with the loading and unloading of pods manually, as well as significantly decrease the risk of an operator dropping a pod while trying to load the machine.

An operator places the pod(s) onto one, two, or all three locations on the Autoloader. The operator then uses the touch screen to start the loading. The Autoloader senses any and all pods present on both the ASML and the Autoloader and makes the transfers that are available. The Autoloader will not transfer/unload a pod until the ASML has an unlocked signal present for that pod.

The system is designed so that there is no downtime for maintenance.

Technical Specifications

Component	Specifications
CONTROL SYSTEM:	Allen-Bradley MicroLogix 1500 PLC.
OPERATOR INTERFACE:	Allen-Bradley PanelView 550.
ENVIRONMENT:	Class 100 Clean Room.
MOTION CONTROL:	Galil Servo Motion Controls.
THROUGHPUT:	POD load or unload up to 3 pods in a 40 second cycle time.
ENVIRONMENT:	Galil®. 14 axes of servo motion.
ITEMS OF NOTE.	Machine design and custom graphical user interface based on input from operators, technicians, engineers, and ergonomic personnel. Designed to be CE certified, if necessary. Floor mounting designed for quick disconnect and easy roll away. Allows complete access to ASML tool for maintenance. The Autoloader has caster wheels on outriggers, so that a technician can quickly separate the autoloader from the ASML. Provided with separate test platform for maintenance away from ASML. No ASML down time due to Autoloader maintenance. The only integration requirements for install are a simple power source of 110-230VAC, 15 amps (machine auto-switches). Extends approximately 18 inches from the front of the ASML machine. Does not require hardwiring between Autoloader and the ASML. Integrated light curtain to protect the operator during pod loading/unloading.
INTEGRATED TECHNICAL CAPABILITIES.	Integrated Motion Control Wafer Handling Clean Room Machines PLC Controls Automated Storage and Retieval Custom Graphical User Interface (GUI)

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